Focused ion beam fabrication of photonic structuresin silicon-on-insulator

dc.contributor.author	Schrauwen, Jonathan
dc.date.accessioned	2021-10-16T19:32:00Z
dc.date.available	2021-10-16T19:32:00Z
dc.date.embargo	9999-12-31
dc.date.issued	2007
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/12866
dc.source.conference	ePIXnet Winter School '07, Applications of Photonic Integration
dc.source.conferencedate	11/03/2007
dc.source.conferencelocation	Pontresina Switzerland
dc.title	Focused ion beam fabrication of photonic structuresin silicon-on-insulator
dc.type	Oral presentation
dspace.entity.type	Publication
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