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FEG-TEM analysis of the effects of Ge segregation and germane flux on the Ge profile across nm-scale SiGe layers, grown by both MBE and CVD
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1908 since deposited on 2021-10-15
Acq. date: 2025-10-23
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1908 since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations