Publication:

Evaluation of ozonated water spray for resist cleaning applications

Date

2000

Proceedings Paper

Simple item page Full metadata Statistics

Files

4235.pdf 4.49 MB

Author(s)

De Gendt, Stefan

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;

;

Van Hoeymissen, Jan

;

Conard, Thierry

;

;

Lagrange, Sébastien

;

;

;

;

Metrics

1974 since deposited on 2021-10-14

Acq. date: 2025-12-09