Correlation of actinic blank inspection and experimental phase defect printability study on NXE3x00 EUV scanner

dc.contributor.author	Jonckheere, Rik
dc.contributor.author	Van Den Heuvel, Dieter
dc.contributor.author	Takagi, Noriaki
dc.contributor.author	Watanabe, Hidehiro
dc.contributor.author	Gallagher, Emily
dc.contributor.imecauthor	Jonckheere, Rik
dc.contributor.imecauthor	Van Den Heuvel, Dieter
dc.contributor.imecauthor	Gallagher, Emily
dc.contributor.orcidimec	Jonckheere, Rik::0000-0003-2211-9443
dc.contributor.orcidimec	Gallagher, Emily::0000-0002-2927-8298
dc.date.accessioned	2021-10-22T19:57:33Z
dc.date.available	2021-10-22T19:57:33Z
dc.date.embargo	9999-12-31
dc.date.issued	2015
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/25438
dc.identifier.url	http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2207817
dc.source.beginpage	942216
dc.source.conference	Extreme Ultraviolet (EUV) Lithography VI
dc.source.conferencedate	22/02/2015
dc.source.conferencelocation	San Jose, CA USA
dc.title	Correlation of actinic blank inspection and experimental phase defect printability study on NXE3x00 EUV scanner
dc.type	Proceedings paper
dspace.entity.type	Publication
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