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Channel engineering and junction overlap issues for ultra-shallow junctions formed by SPER in the 45 nm CMOS technology node
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1911 since deposited on 2021-10-15
1last month
Acq. date: 2025-12-08
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Metrics
Views
1911 since deposited on 2021-10-15
1last month
Acq. date: 2025-12-08
Citations