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IR Laser Release for 3D Stacked Devices: Effect of the Release Stack Structure on the Debonding Mechanism
Publication:
IR Laser Release for 3D Stacked Devices: Effect of the Release Stack Structure on the Debonding Mechanism
Date
2024
Proceedings Paper
https://doi.org/10.1109/ECTC51529.2024.00063
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Chancerel, Francois
;
Urban, Peter
;
Slabbekoorn, John
;
Halas, Simon
;
Bravin, Julian
;
Brems, Steven
;
Uhrmann, Thomas
;
Wimplinger, Markus
;
Phommahaxay, Alain
;
Beyne, Eric
Journal
N/A
Abstract
Description
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Views
238
since deposited on 2024-12-07
Acq. date: 2025-10-26
Citations
Metrics
Views
238
since deposited on 2024-12-07
Acq. date: 2025-10-26
Citations