Publication:

IR Laser Release for 3D Stacked Devices: Effect of the Release Stack Structure on the Debonding Mechanism

Date

2024
Proceedings Paper
https://doi.org/10.1109/ECTC51529.2024.00063
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Author(s)

Chancerel, Francois  
;
Urban, Peter
;
Slabbekoorn, John  
;
Halas, Simon
;
Bravin, Julian
;
Brems, Steven  
;
Uhrmann, Thomas
;
Wimplinger, Markus
;
Phommahaxay, Alain  
;
Beyne, Eric  

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N/A

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245 since deposited on 2024-12-07
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245 since deposited on 2024-12-07
1last month
Acq. date: 2026-04-13

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