Publication:

Mitigation of the etch-induced intra-field overlay contribution

Date

2022

Proceedings Paper

https://doi.org/10.1117/12.2614255

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Author(s)

van Haren, Richard

;

Yildirim, Oktay

;

Mouraille, Orion

;

;

;

Feurprier, Yannick

;

Jehoul, Christiane

;

Journal

Proceedings of SPIE

Metrics

1205 since deposited on 2022-09-08

Acq. date: 2026-01-11