Improving tomographic sensing of Scalpel SPM with multi-probe functionality and automatic removal rate extraction

dc.contributor.author	O'Sullivan, C.
dc.contributor.author	Tedaldi, M.
dc.contributor.author	Humphris, A. D. L.
dc.contributor.author	Hole, J. P.
dc.contributor.author	Goulden, J.
dc.contributor.author	Drilakis, Christos
dc.contributor.author	Hantschel, Thomas
dc.contributor.author	Celano, Umberto
dc.contributor.imecauthor	Drilakis, Christos
dc.contributor.imecauthor	Hantschel, Thomas
dc.contributor.imecauthor	Celano, Umberto
dc.contributor.orcidimec	Hantschel, Thomas::0000-0001-9476-4084
dc.contributor.orcidimec	Celano, Umberto::0000-0002-2856-3847
dc.date.accessioned	2022-05-03T11:24:40Z
dc.date.available	2022-04-28T02:12:48Z
dc.date.available	2022-05-03T11:24:40Z
dc.date.issued	2021
dc.identifier.doi	10.1109/IPFA53173.2021.9617432
dc.identifier.eisbn	978-1-6654-3988-6
dc.identifier.issn	1946-1550
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/39694
dc.publisher	IEEE
dc.source.conference	IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)
dc.source.conferencedate	SEP 14-OCT 13, 2021
dc.source.conferencelocation	Virtual
dc.source.journal	na
dc.source.numberofpages	4
dc.title	Improving tomographic sensing of Scalpel SPM with multi-probe functionality and automatic removal rate extraction
dc.type	Proceedings paper
dspace.entity.type	Publication
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