Publication:
Scalpel Soft Retrace Scanning Spreading Resistance microscopy for 3D-carrier profiling in sub 10-nm WFIN FinFETs
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1803 since deposited on 2021-10-22
Acq. date: 2025-12-16
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Metrics
Views
1803 since deposited on 2021-10-22
Acq. date: 2025-12-16
Citations