Publication:
Scalpel Soft Retrace Scanning Spreading Resistance microscopy for 3D-carrier profiling in sub 10-nm WFIN FinFETs
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1807 since deposited on 2021-10-22
1last month
Acq. date: 2026-05-18
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Views
1807 since deposited on 2021-10-22
1last month
Acq. date: 2026-05-18
Citations