Publication:
Dielectric quality and reliability of FUSI/HfSiON devices with process induced strain
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1936 since deposited on 2021-10-16
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Acq. date: 2026-03-17
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Statistics
Views
1936 since deposited on 2021-10-16
2last month
1last week
Acq. date: 2026-03-17
Citations