Interface characterization of nanoscale laminate structures on dense dielectric substrates by x-ray reflectivity

dc.contributor.author	Travaly, Youssef
dc.contributor.author	Schuhmacher, Jorg
dc.contributor.author	Martin Hoyas, Ana
dc.contributor.author	Van Hove, Marleen
dc.contributor.author	Maex, Karen
dc.contributor.author	Abell, Thomas
dc.contributor.author	Sutcliffe, Victor
dc.contributor.author	Jonas, A.M.
dc.contributor.imecauthor	Maex, Karen
dc.date.accessioned	2021-10-16T05:47:37Z
dc.date.available	2021-10-16T05:47:37Z
dc.date.issued	2005-04
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/11332
dc.source.issue	16
dc.source.journal	Virtual Journal of Nanoscale Science and Technology
dc.source.volume	11
dc.title	Interface characterization of nanoscale laminate structures on dense dielectric substrates by x-ray reflectivity
dc.type	Journal article
dspace.entity.type	Publication
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