Publication:

Key factors to sustain the extension of a MHM-based integration scheme to medium and high porosity PECVD low-k materials

Date

2008
Proceedings Paper
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Author(s)

Travaly, Youssef
;
Van Aelst, Joke  
;
Truffert, Vincent  
;
Verdonck, Patrick  
;
Dupont, Tania  
;
Camerotto, Elisabeth  
;
Richard, Olivier  
;
Bender, Hugo  
;
Croes, Kristof  
;
De Roest, David  
;
Vereecke, Guy  
;
Claes, Martine  
;
Le, Quoc Toan  
;
Kesters, Els  
;
Van Cauwenberghe, Marc  
;
Beynet, Julien
;
Kaneko, S.
;
Struyf, Herbert  
;
Baklanov, Mikhaïl
;
Matsushita, K.
;
Kobayashi, N.
;
Sprey, Hessel  
;
Beyer, Gerald  

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Abstract

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2009 since deposited on 2021-10-17
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2009 since deposited on 2021-10-17
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Acq. date: 2026-10-09

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