Publication:

Influence of porosity on electrical properties of low-k dielectrics

Date

2012

Journal article

https://doi.org/10.1016/j.mee.2011.04.015

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Files

21781.pdf 383.74 KB

Author(s)

Van Besien, Els

;

Pantouvaki, Marianna

;

;

De Roest, David

;

Baklanov, Mikhaïl

;

;

Journal

Microelectronic Engineering

Statistics

1921 since deposited on 2021-10-20

Acq. date: 2026-02-24