Publication:

Influence of porosity on electrical properties of low-k dielectrics

Date

2012
Journal article
https://doi.org/10.1016/j.mee.2011.04.015
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21781.pdf 383.74 KB

Author(s)

Van Besien, Els  
;
Pantouvaki, Marianna  
;
Zhao, Larry
;
De Roest, David  
;
Baklanov, Mikhaïl
;
Tokei, Zsolt  
;
Beyer, Gerald  

Journal

Microelectronic Engineering

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