Publication:

Influence of porosity on electrical properties of low-k dielectrics

Date

2012
Journal article
https://doi.org/10.1016/j.mee.2011.04.015
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dc.contributor.authorVan Besien, Els
dc.contributor.authorPantouvaki, Marianna
dc.contributor.authorZhao, Larry
dc.contributor.authorDe Roest, David
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorTokei, Zsolt
dc.contributor.authorBeyer, Gerald
dc.contributor.imecauthorVan Besien, Els
dc.contributor.imecauthorPantouvaki, Marianna
dc.contributor.imecauthorDe Roest, David
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.orcidimecVan Besien, Els::0000-0002-5174-2229
dc.date.accessioned2021-10-20T17:32:02Z
dc.date.available2021-10-20T17:32:02Z
dc.date.embargo9999-12-31
dc.date.issued2012
dc.identifier.doi10.1016/j.mee.2011.04.015
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21682
dc.source.beginpage59
dc.source.endpage61
dc.source.issue1
dc.source.journalMicroelectronic Engineering
dc.source.volume92
dc.title

Influence of porosity on electrical properties of low-k dielectrics

dc.typeJournal article
dspace.entity.typePublication
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