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Processing impact on the reliability of single metal dual dielectric (SMDD) gate stacks
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Processing impact on the reliability of single metal dual dielectric (SMDD) gate stacks
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Date
2009
Proceedings Paper
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18055.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Kauerauf, Thomas
;
Aoulaiche, Marc
;
Cho, Moon Ju
;
Ragnarsson, Lars-Ake
;
Schram, Tom
;
Degraeve, Robin
;
Hoffmann, Thomas Y.
;
Groeseneken, Guido
;
Biesemans, Serge
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Views
1833
since deposited on 2021-10-17
2
last month
Acq. date: 2025-12-15
Citations