Publication:

Processing impact on the reliability of single metal dual dielectric (SMDD) gate stacks

Date

2009
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorKauerauf, Thomas
dc.contributor.authorAoulaiche, Marc
dc.contributor.authorCho, Moon Ju
dc.contributor.authorRagnarsson, Lars-Ake
dc.contributor.authorSchram, Tom
dc.contributor.authorDegraeve, Robin
dc.contributor.authorHoffmann, Thomas Y.
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorBiesemans, Serge
dc.contributor.imecauthorRagnarsson, Lars-Ake
dc.contributor.imecauthorSchram, Tom
dc.contributor.imecauthorDegraeve, Robin
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorBiesemans, Serge
dc.contributor.orcidimecRagnarsson, Lars-Ake::0000-0003-1057-8140
dc.date.accessioned2021-10-17T23:20:28Z
dc.date.available2021-10-17T23:20:28Z
dc.date.embargo9999-12-31
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15573
dc.source.beginpage373
dc.source.conference47th Annual IEEE International Reliability Physics Symposium - IRPS
dc.source.conferencedate26/04/2009
dc.source.conferencelocationMontreal Canada
dc.source.endpage375
dc.title

Processing impact on the reliability of single metal dual dielectric (SMDD) gate stacks

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
18055.pdf
Size:
243.27 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions