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Challenges in setting up the patterning processes for a 16nm node SRAM cell
Publication:
Challenges in setting up the patterning processes for a 16nm node SRAM cell
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Date
2010
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21561.pdf
7.23 MB
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Ercken, Monique
;
Vandeweyer, Tom
;
Versluijs, Janko
;
Truffert, Vincent
;
De Backer, Johan
;
Delvaux, Christie
;
Baerts, Christina
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1960
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Acq. date: 2025-12-15
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Metrics
Views
1960
since deposited on 2021-10-18
1
last month
1
last week
Acq. date: 2025-12-15
Citations