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TOF-SIMS as a rapid diagnostic tool to monitor the growth mode of thin (high k) films
Publication:
TOF-SIMS as a rapid diagnostic tool to monitor the growth mode of thin (high k) films
Date
2003
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Conard, Thierry
;
Vandervorst, Wilfried
;
Petry, Jasmine
;
Zhao, Chao
;
Besling, W.
;
Nohira, Hiroshi
;
Richard, Olivier
Journal
Applied Surface Science
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2046
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations
Metrics
Views
2046
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations