Publication:
Improving OPC Model Accuracy of Dry Resist for Low k1 EUV Patterning
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Acq. date: 2026-03-18
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Downloads
680 since deposited on 2024-06-15
7last month
3last week
Acq. date: 2026-03-18
Views
645 since deposited on 2024-06-15
1last month
Acq. date: 2026-03-17
Citations