Publication:
Improving OPC Model Accuracy of Dry Resist for Low k1 EUV Patterning
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Acq. date: 2026-04-26
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689 since deposited on 2024-06-15
6last month
1last week
Acq. date: 2026-04-26
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647 since deposited on 2024-06-15
1last month
Acq. date: 2026-04-26
Citations