Publication:
Improving OPC Model Accuracy of Dry Resist for Low k1 EUV Patterning
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Acq. date: 2026-08-31
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723 since deposited on 2024-06-15
14last month
Acq. date: 2026-08-31
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647 since deposited on 2024-06-15
Acq. date: 2026-08-31
Citations