Publication:
Improving OPC Model Accuracy of Dry Resist for Low k1 EUV Patterning
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Acq. date: 2026-02-25
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644 since deposited on 2024-06-15
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674 since deposited on 2024-06-15
3last month
1last week
Acq. date: 2026-02-25
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644 since deposited on 2024-06-15
Acq. date: 2026-02-25
Citations