Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Presentations
3D MEMS Metrology @ IMEC: opportunities and problems
Publication:
3D MEMS Metrology @ IMEC: opportunities and problems
Copy permalink
Date
2008
Presentation
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
17863.pdf
868.17 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Pieters, Philip
;
De Wolf, Ingrid
Journal
Abstract
Description
Metrics
Views
1962
since deposited on 2021-10-17
Acq. date: 2025-12-16
Citations
Metrics
Views
1962
since deposited on 2021-10-17
Acq. date: 2025-12-16
Citations