Publication:

3D MEMS Metrology @ IMEC: opportunities and problems

Date

2008
Presentation
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dc.contributor.authorPieters, Philip
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.imecauthorPieters, Philip
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.contributor.orcidimecPieters, Philip::0000-0001-7670-0132
dc.date.accessioned2021-10-17T09:51:40Z
dc.date.available2021-10-17T09:51:40Z
dc.date.embargo9999-12-31
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14317
dc.source.conferenceSemi Standards Meeting on 3D MEMS Metrology
dc.source.conferencedate20/05/2008
dc.source.conferencelocationZürich Switzerland
dc.title

3D MEMS Metrology @ IMEC: opportunities and problems

dc.typeOral presentation
dspace.entity.typePublication
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