Publication:

Spacer self aligned double patterning: process control

Date

2009

Presentation

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Author(s)

Vandeweyer, Tom

;

Altamirano Sanchez, Efrain

;

Vangoidsenhoven, Diziana

;

;

Groenendijk, Remco

;

;

;

;

;

;

Maenhoudt, Mireille

Statistics

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Acq. date: 2026-06-02