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Interface properties improvement of Ge/Al2O3 and Ge/GeO2/Al2O3 gate stacks using molecular beam deposition
Publication:
Interface properties improvement of Ge/Al2O3 and Ge/GeO2/Al2O3 gate stacks using molecular beam deposition
Date
2008
Meeting abstract
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17123.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Bellenger, Florence
;
Merckling, Clement
;
Penaud, J.
;
Houssa, Michel
;
Caymax, Matty
;
Meuris, Marc
;
De Meyer, Kristin
;
Heyns, Marc
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Abstract
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Metrics
Views
1897
since deposited on 2021-10-17
412
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations