Publication:

Nanofabrication of sharp conductive diamond tip probe chips and their application in reverse tip sample scanning probe microscopy

Date

2025-SEP
Journal article
https://doi.org/10.1016/j.mne.2025.100307
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dc.contributor.authorWouters, L.
dc.contributor.authorCho, J.
dc.contributor.authorGim, S.
dc.contributor.authorYang, J.
dc.contributor.authorKanniainen, A.
dc.contributor.authorLee, K.
dc.contributor.authorLagrain, P.
dc.contributor.authorPeric, N.
dc.contributor.authorHantschel, T.
dc.contributor.imecauthorWouters, L.
dc.contributor.imecauthorCho, J.
dc.contributor.imecauthorGim, S.
dc.contributor.imecauthorYang, J.
dc.contributor.imecauthorKanniainen, A.
dc.contributor.imecauthorLee, K.
dc.contributor.imecauthorLagrain, P.
dc.contributor.imecauthorPeric, N.
dc.contributor.imecauthorHantschel, T.
dc.date.accessioned2025-07-18T04:02:08Z
dc.date.available2025-07-18T04:02:08Z
dc.date.issued2025-SEP
dc.description.wosFundingTextThis work was done in the imec IIAP core CMOS programs. We acknowledge the provided support by Bruker Corporation in the framework of an imec-Bruker joint development project on the development of RTS SPM. Jinwan Cho and Sugil Gim acknowledge the financial support of their scholarships by the Korean government (P0017312) . Additionally, we acknowledge the imec Logic and Optical IO programs for providing us with suitable samples for probe chip evaluation.
dc.identifier.doi10.1016/j.mne.2025.100307
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/45912
dc.publisherELSEVIER
dc.source.journalMICRO AND NANO ENGINEERING
dc.source.numberofpages6
dc.source.volume28
dc.subject.keywordsRESOLUTION
dc.subject.keywordsSILICON
dc.title

Nanofabrication of sharp conductive diamond tip probe chips and their application in reverse tip sample scanning probe microscopy

dc.typeJournal article
dspace.entity.typePublication
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