Publication:

Novel micromirror design with variable pull-in voltage

Date

2009
Presentation
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dc.contributor.authorBeernaert, R.
dc.contributor.authorPodprocky, Tomas
dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorHaspeslagh, Luc
dc.contributor.authorAvci, Aykut
dc.contributor.authorDe Smet, Jelle
dc.contributor.authorDe Smet, Herbert
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorHaspeslagh, Luc
dc.contributor.imecauthorDe Smet, Herbert
dc.date.accessioned2021-10-17T21:21:14Z
dc.date.available2021-10-17T21:21:14Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14964
dc.source.conference35th International Conference on Micro & Nano Engineering (MNE)
dc.source.conferencedate28/09/2009
dc.source.conferencelocationGent Belgium
dc.title

Novel micromirror design with variable pull-in voltage

dc.typeOral presentation
dspace.entity.typePublication
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