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Oxide phase determination in silicon using infrared spectroscopy and transmission electron microscopy techniques
Publication:
Oxide phase determination in silicon using infrared spectroscopy and transmission electron microscopy techniques
Date
2002
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
De Gryse, O.
;
Clauws, P.
;
Van Landuyt, J.
;
Lebedev, O.
;
Claeys, Cor
;
Simoen, Eddy
;
Vanhellemont, Jan
Journal
Journal of Applied Physics
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1959
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations
Metrics
Views
1959
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations