Oxide phase determination in silicon using infrared spectroscopy and transmission electron microscopy techniques

dc.contributor.author	De Gryse, O.
dc.contributor.author	Clauws, P.
dc.contributor.author	Van Landuyt, J.
dc.contributor.author	Lebedev, O.
dc.contributor.author	Claeys, Cor
dc.contributor.author	Simoen, Eddy
dc.contributor.author	Vanhellemont, Jan
dc.contributor.imecauthor	Simoen, Eddy
dc.contributor.orcidimec	Simoen, Eddy::0000-0002-5218-4046
dc.date.accessioned	2021-10-14T21:21:24Z
dc.date.available	2021-10-14T21:21:24Z
dc.date.issued	2002
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/6187
dc.source.beginpage	2493
dc.source.endpage	2498
dc.source.issue	4
dc.source.journal	Journal of Applied Physics
dc.source.volume	91
dc.title	Oxide phase determination in silicon using infrared spectroscopy and transmission electron microscopy techniques
dc.type	Journal article
dspace.entity.type	Publication
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