Composite polymer-core silica-shell abrasive particles during oxide CMP: a defectivity study

Publication:

2007

Journal article

Author(s)

;

Whelan, Caroline

;

;

;

Moinpour, Mansour

Journal of The Electrochemical Society

1900 since deposited on 2021-10-16

Acq. date: 2026-03-17