Publication:
Composite polymer-core silica-shell abrasive particles during oxide CMP: a defectivity study
Date
| dc.contributor.author | Armini, Silvia | |
| dc.contributor.author | Whelan, Caroline | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.author | Hernandez, Jose Luis | |
| dc.contributor.author | Moinpour, Mansour | |
| dc.contributor.imecauthor | Armini, Silvia | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.contributor.imecauthor | Hernandez, Jose Luis | |
| dc.contributor.orcidimec | Armini, Silvia::0000-0003-0578-3422 | |
| dc.date.accessioned | 2021-10-16T15:00:54Z | |
| dc.date.available | 2021-10-16T15:00:54Z | |
| dc.date.issued | 2007 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/11657 | |
| dc.source.beginpage | H667 | |
| dc.source.endpage | H371 | |
| dc.source.issue | 8 | |
| dc.source.journal | Journal of The Electrochemical Society | |
| dc.source.volume | 154 | |
| dc.title | Composite polymer-core silica-shell abrasive particles during oxide CMP: a defectivity study | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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