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Vertically stacked gate-all-around Si nanowire transistors: key process optimizations and ring oscillator demonstration

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2036 since deposited on 2021-10-24
2last month
1last week
Acq. date: 2026-02-25

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2036 since deposited on 2021-10-24
2last month
1last week
Acq. date: 2026-02-25

Citations