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Electrical characterization of SrBi2Ta2O2O9(SBT)/high-k gate stack in metal-ferroelectric-insulator-semiconductor structure

Date

2005-09
Dissertation
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dc.contributor.authorXu, Zhen
dc.contributor.thesisadvisorGroeseneken, Guido
dc.contributor.thesisadvisorMaes, Herman
dc.date.accessioned2021-10-16T07:17:43Z
dc.date.available2021-10-16T07:17:43Z
dc.date.embargo9999-12-31
dc.date.issued2005-09
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11580
dc.title

Electrical characterization of SrBi2Ta2O2O9(SBT)/high-k gate stack in metal-ferroelectric-insulator-semiconductor structure

dc.typePHD thesis
dspace.entity.typePublication
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