Publication:
Epitaxial growth of Ga doped SiGe for reduction of contact resistance in finFET source/drain materials
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1955 since deposited on 2021-10-27
3last month
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Acq. date: 2026-05-17
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Statistics
Views
1955 since deposited on 2021-10-27
3last month
2last week
Acq. date: 2026-05-17
Citations