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Epitaxial growth of Ga doped SiGe for reduction of contact resistance in finFET source/drain materials
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1946 since deposited on 2021-10-27
1last month
Acq. date: 2025-12-11
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Metrics
Views
1946 since deposited on 2021-10-27
1last month
Acq. date: 2025-12-11
Citations