Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Conference contributions
Epitaxial growth of Ga doped SiGe for reduction of contact resistance in finFET source/drain materials
Publication:
Epitaxial growth of Ga doped SiGe for reduction of contact resistance in finFET source/drain materials
Date
2019
Meeting abstract
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Margetis, Joe
;
Kohen, David
;
Porret, Clément
;
Petersen Barbosa Lima, Lucas
;
Khazaka, Rami
;
Loo, Roger
;
Tolle, John
Journal
Abstract
Description
Metrics
Views
1943
since deposited on 2021-10-27
Acq. date: 2025-10-25
Citations
Metrics
Views
1943
since deposited on 2021-10-27
Acq. date: 2025-10-25
Citations