Publication:

Atomic layer deposition of Hf-based materials in semiconductor applications

Date

2008
Meeting abstract
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

17800.pdf 125.18 KB

Author(s)

Nyns, Laura  
;
Delabie, Annelies  
;
Heyns, Marc  
;
Pourtois, Geoffrey  
;
Van Elshocht, Sven  
;
Vinckier, Chris
;
De Gendt, Stefan  

Journal

Abstract

Description

Statistics

Views

1953 since deposited on 2021-10-17
Acq. date: 2026-05-18

Citations

Statistics

Views

1953 since deposited on 2021-10-17
Acq. date: 2026-05-18

Citations