Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Conference contributions
Fine-pitch 3D System Integration and Advanced CMOS nodes: Technology and System Design Perspective
Publication:
Fine-pitch 3D System Integration and Advanced CMOS nodes: Technology and System Design Perspective
Copy permalink
Date
2021-02-22
Proceedings Paper
https://doi.org/10.1117/12.2584532
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
Accepted version
4.17 MB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Milojevic, Dragomir
;
Sisto, Giuliano
;
Van der Plas, Geert
;
Beyne, Eric
Journal
Proceedings of SPIE
Abstract
Description
Metrics
Downloads
253
since deposited on 2021-11-02
31
last month
7
last week
Acq. date: 2025-12-15
Views
1648
since deposited on 2021-11-02
3
last month
Acq. date: 2025-12-15
Citations
Metrics
Downloads
253
since deposited on 2021-11-02
31
last month
7
last week
Acq. date: 2025-12-15
Views
1648
since deposited on 2021-11-02
3
last month
Acq. date: 2025-12-15
Citations