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Fine-pitch 3D System Integration and Advanced CMOS nodes: Technology and System Design Perspective
Publication:
Fine-pitch 3D System Integration and Advanced CMOS nodes: Technology and System Design Perspective
Date
2021-02-22
Proceedings Paper
https://doi.org/10.1117/12.2584532
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4.17 MB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Milojevic, Dragomir
;
Sisto, Giuliano
;
Van der Plas, Geert
;
Beyne, Eric
Journal
Proceedings of SPIE
Abstract
Description
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Downloads
196
since deposited on 2021-11-02
Acq. date: 2025-10-26
Views
1643
since deposited on 2021-11-02
Acq. date: 2025-10-26
Citations
Metrics
Downloads
196
since deposited on 2021-11-02
Acq. date: 2025-10-26
Views
1643
since deposited on 2021-11-02
Acq. date: 2025-10-26
Citations