Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Conference contributions
3D stacked ICs using Cu TSVs and die to wafer hybrid collective bonding
Publication:
3D stacked ICs using Cu TSVs and die to wafer hybrid collective bonding
Date
2009
Proceedings Paper
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
19074.pdf
539.56 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Katti, Guruprasad
;
Mercha, Abdelkarim
;
Van Olmen, Jan
;
Huyghebaert, Cedric
;
Jourdain, Anne
;
Stucchi, Michele
;
Rakowski, Michal
;
Debusschere, Ingrid
;
Soussan, Philippe
;
Dehaene, Wim
;
De Meyer, Kristin
;
Travaly, Youssef
;
Beyne, Eric
;
Biesemans, Serge
;
Swinnen, Bart
Journal
Abstract
Description
Metrics
Downloads
1
since deposited on 2021-10-17
Acq. date: 2025-10-27
Views
2039
since deposited on 2021-10-17
Acq. date: 2025-10-27
Citations
Metrics
Downloads
1
since deposited on 2021-10-17
Acq. date: 2025-10-27
Views
2039
since deposited on 2021-10-17
Acq. date: 2025-10-27
Citations