Publication:
Determination par EDS de l'épaisseur et de la composition de films minces multicouches pour applications nanoélectroniques
Date
| dc.contributor.author | Franquet, Alexis | |
| dc.contributor.author | Conard, Thierry | |
| dc.contributor.author | Gilbert, Matthieu | |
| dc.contributor.author | Hantschel, Thomas | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Franquet, Alexis | |
| dc.contributor.imecauthor | Conard, Thierry | |
| dc.contributor.imecauthor | Hantschel, Thomas | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.contributor.orcidimec | Franquet, Alexis::0000-0002-7371-8852 | |
| dc.contributor.orcidimec | Conard, Thierry::0000-0002-4298-5851 | |
| dc.contributor.orcidimec | Hantschel, Thomas::0000-0001-9476-4084 | |
| dc.date.accessioned | 2021-10-20T11:04:52Z | |
| dc.date.available | 2021-10-20T11:04:52Z | |
| dc.date.issued | 2012 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/20694 | |
| dc.source.conference | 5ème Conférence Francophone sur les Spectroscopies d'Electrons - ELSPEC | |
| dc.source.conferencedate | 22/05/2012 | |
| dc.source.conferencelocation | Louvain La Neuve Belgium | |
| dc.title | Determination par EDS de l'épaisseur et de la composition de films minces multicouches pour applications nanoélectroniques | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
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