Publication:

PFAS-free EUV rinse for advanced technology nodes

Date

2024

Proceedings Paper

https://doi.org/10.1117/12.3034706

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Author(s)

Fallica, Roberto

;

;

;

De Simone, Danilo

Journal

Proceedings of SPIE

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132 since deposited on 2025-05-11

Acq. date: 2026-04-06