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Articles
Detection of Failure Mechanisms in 24-40 nm FinFETs with (spectral) photon emission techniques using InGaAs camera
Publication:
Detection of Failure Mechanisms in 24-40 nm FinFETs with (spectral) photon emission techniques using InGaAs camera
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Date
2018
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vogt, Ivo
;
Nakamura, T.
;
De Wolf, Ingrid
;
Boit, Christian
Journal
Microelectronics Reliability
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1836
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Acq. date: 2025-12-16
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Metrics
Views
1836
since deposited on 2021-10-26
1
last month
Acq. date: 2025-12-16
Citations