Publication:

Detection of Failure Mechanisms in 24-40 nm FinFETs with (spectral) photon emission techniques using InGaAs camera

Date

2018
Journal article
Simple item page Full metadata Statistics
 
dc.contributor.authorVogt, Ivo
dc.contributor.authorNakamura, T.
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorBoit, Christian
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.date.accessioned2021-10-26T08:49:44Z
dc.date.available2021-10-26T08:49:44Z
dc.date.embargo9999-12-31
dc.date.issued2018
dc.identifier.issn0026-2714
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/32219
dc.identifier.urlhttps://doi.org/10.1016/j.microrel.2018.06.080
dc.source.beginpage334
dc.source.endpage338
dc.source.journalMicroelectronics Reliability
dc.source.volume88-90
dc.title

Detection of Failure Mechanisms in 24-40 nm FinFETs with (spectral) photon emission techniques using InGaAs camera

dc.typeJournal article
dspace.entity.typePublication
Files

Original bundle

Name:
38601.pdf
Size:
2.73 MB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Articles