Publication:

Hyper NA EUV lithography: an imaging perspective

Date

2023
Journal article
https://doi.org/10.1117/1.jmm.22.4.043202
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Author(s)

Lee, Inhwan  
;
Franke, Joern-Holger
;
Philipsen, Vicky  
;
Ronse, Kurt  
;
De Gendt, Stefan  
;
Hendrickx, Eric  

Journal

JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3

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1113 since deposited on 2024-02-27
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Acq. date: 2026-07-18

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