Publication:

Room temperature and zero pressure high quality oxide direct bonding for 3D self-aligned assembly

Date

2014

Proceedings Paper

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Files

30522.pdf 1.4 MB

Author(s)

;

Van Huylenbroeck, Stefaan

;

Tutunjyan, Nina

;

Slabbekoorn, John

;

De Wolf, Ingrid

;

Rebibis, Kenneth June

;

;

Celis, Jean-Pierre

;

;

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Acq. date: 2026-02-28