Publication:

Ni fully silicided gates for 45 nm CMOS applications

Date

2005-08

Journal article

Simple item page Full metadata Statistics

Files

10710.pdf 1.41 MB

Author(s)

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Kmieciak, Malgorzata

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Veloso, Anabela

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Kottantharayil, Anil

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Pourtois, Geoffrey

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Demeurisse, Caroline

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de Potter de ten Broeck, Muriel

;

Vrancken, Christa

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Journal

Microelectronic Engineering

Statistics

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