Publication:
Dopant profiling in NixSi1-x gates with SIMS
Date
| dc.contributor.author | Janssens, Tom | |
| dc.contributor.author | Kmieciak, Malgorzata | |
| dc.contributor.author | Kittl, Jorge | |
| dc.contributor.author | Fouchier, Marc | |
| dc.contributor.author | Lauwers, Anne | |
| dc.contributor.author | Kottantharayil, Anil | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Lauwers, Anne | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.date.accessioned | 2021-10-16T02:18:53Z | |
| dc.date.available | 2021-10-16T02:18:53Z | |
| dc.date.issued | 2005 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/10645 | |
| dc.source.conference | USJ - The 8th Int. Workshop on the Fabrication, Characterization and Modeling of Ultra Shallow Junctions in Semiconductors | |
| dc.source.conferencedate | 5/06/2005 | |
| dc.source.conferencelocation | Daytona Beach, FL USA | |
| dc.title | Dopant profiling in NixSi1-x gates with SIMS | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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