Publication:

Barrier deposition on porous low-k films

Date

2003

Proceedings Paper

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Files

8138.pdf 314.49 KB

Author(s)

Shamiryan, Denis

;

Yanovitskaya, Z.S.

;

Iacopi, Francesca

;

Statistics

1966 since deposited on 2021-10-15

Acq. date: 2026-03-17