Fabrication and use of metal tip and tip-on-tip probes for AFM-based device analysis

dc.contributor.author	Hantschel, Thomas
dc.contributor.author	De Wolf, Peter
dc.contributor.author	Trenkler, Thomas
dc.contributor.author	Stephenson, Robert
dc.contributor.author	Vandervorst, Wilfried
dc.contributor.imecauthor	Hantschel, Thomas
dc.contributor.imecauthor	Vandervorst, Wilfried
dc.contributor.orcidimec	Hantschel, Thomas::0000-0001-9476-4084
dc.date.accessioned	2021-09-30T12:08:08Z
dc.date.available	2021-09-30T12:08:08Z
dc.date.embargo	9999-12-31
dc.date.issued	1998
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/2619
dc.source.beginpage	92
dc.source.conference	Materials and Device Characterization in Micromachining
dc.source.conferencedate	21/09/1998
dc.source.conferencelocation	Santa Clara, CA USA
dc.source.endpage	103
dc.title	Fabrication and use of metal tip and tip-on-tip probes for AFM-based device analysis
dc.type	Proceedings paper
dspace.entity.type	Publication
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