Publication:
On the impact of interface energy and vacancy concentration on morphology changes and nucleation of oxide precipitates in silicon
Date
| dc.contributor.author | Vanhellemont, Jan | |
| dc.date.accessioned | 2021-09-29T15:44:04Z | |
| dc.date.available | 2021-09-29T15:44:04Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 1996 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/1607 | |
| dc.source.beginpage | 3413 | |
| dc.source.endpage | 3415 | |
| dc.source.issue | 24 | |
| dc.source.journal | Applied Physics Letters | |
| dc.source.volume | 68 | |
| dc.title | On the impact of interface energy and vacancy concentration on morphology changes and nucleation of oxide precipitates in silicon | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | Original bundle
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| Publication available in collections: |