Publication:

SiGe vs. Si selective wet etchingfor Si gate-all-around

Date

2018

Proceedings Paper

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Author(s)

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Yoshida, Yukifumi

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Hikavyy, Andriy

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Holsteyns, Frank

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Horiguchi, Naoto

Statistics

1925 since deposited on 2021-10-25

Acq. date: 2026-04-26