Publication:

Photon emission as a characterization tool for bipolar parasitics in FinFET technology

Date

2018
Journal article
Simple item page Full metadata Statistics
 
dc.contributor.authorBeyreuther, A.
dc.contributor.authorHerfurth, N.
dc.contributor.authorAmini, E.
dc.contributor.authorNakamura, T.
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorBoit, C.
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.date.accessioned2021-10-25T16:44:08Z
dc.date.available2021-10-25T16:44:08Z
dc.date.embargo9999-12-31
dc.date.issued2018
dc.identifier.issn0026-2714
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30244
dc.identifier.urlhttps://doi.org/10.1016/j.microrel.2018.07.091
dc.source.beginpage273
dc.source.endpage276
dc.source.journalMicroelectronics Reliability
dc.source.volume88-90
dc.title

Photon emission as a characterization tool for bipolar parasitics in FinFET technology

dc.typeJournal article
dspace.entity.typePublication
Files

Original bundle

Name:
38598.pdf
Size:
1.68 MB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Articles