Publication:
High-Q photonic crystal nanocavities on 300 mm SOI substrate fabricated by 193 nm immersion lithography
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1973 since deposited on 2021-10-22
5last month
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Acq. date: 2026-08-05
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Statistics
Views
1973 since deposited on 2021-10-22
5last month
3last week
Acq. date: 2026-08-05
Citations