Publication:
High-Q photonic crystal nanocavities on 300 mm SOI substrate fabricated by 193 nm immersion lithography
Date
Loading...
Files
Journal
Abstract
Description
Metrics
Views
1956 since deposited on 2021-10-22
2last month
1last week
Acq. date: 2025-12-10
Citations
Metrics
Views
1956 since deposited on 2021-10-22
2last month
1last week
Acq. date: 2025-12-10
Citations