Publication:
High-Q photonic crystal nanocavities on 300 mm SOI substrate fabricated by 193 nm immersion lithography
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1969 since deposited on 2021-10-22
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Acq. date: 2026-07-17
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1969 since deposited on 2021-10-22
1last month
1last week
Acq. date: 2026-07-17
Citations