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Properties and growth peculiarities of Si0.30Ge0.70 stressor integrated in 14 nm fin-based p-type metal-oxide-semiconductor field-effect transistors
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Properties and growth peculiarities of Si0.30Ge0.70 stressor integrated in 14 nm fin-based p-type metal-oxide-semiconductor field-effect transistors
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Date
2016
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Hikavyy, Andriy
;
Rosseel, Erik
;
Kubicek, Stefan
;
Mannaert, Geert
;
Favia, Paola
;
Bender, Hugo
;
Loo, Roger
;
Horiguchi, Naoto
Journal
Thin Solid Films
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Views
1823
since deposited on 2021-10-23
3
last month
2
last week
Acq. date: 2026-08-08
Citations